Atomic force microscope:
for the imaging of sample surface with atomic level resolution, nanomanipulation,
lithography and indentation options, conductivity measurements, liquid cell
for biological samples
Reactive Ion Etching
(RIE): for the dry etching of sensor materials
Exposure lamps and
mask aligner system: for example for the exposure of ultraviolet light sensitive
materials
Electron
beam gun evaporator: for the coating of materials
Particle
free working environment and appropriate testing instruments (a line for the
clean space working and a class II safe cabinet)
Our facilities
can be used for the machining of silicon and other common sensor materials.
Examples can be found from the fabrication of microweighing systems and infrared
sensitive sensors. Our laboratory is developing also soft lithographic techniques,
which can be used for the fabrication of micro channels or conductive structures
etc. Base material can be almost any polymer; the most common substrate material
is biocompatible polydimethylsiloxane (PDMS). Softlithographic applications
can be found in pacemakers, implants and many stimulating/registering sensors.
Microsensorlaboratory
is located in the laboratory unit of Microteknia 3 - a key place in the technology
center of Kuopio, Finland.
Contacts:
Microsensor Laboratory
Project Manager Mikko Laasanen
Tel: +358-(0)44-785 5591
Email: mikko.laasanen@savonia-amk.fi
Brochures:
Microsensorlaboratory
Development
of automation in the different fields of industry and medicine has increased
sensor technology related research and development activities. Most of the modern
sensors are based on micro and nanotechnology. Easiness of transportation, mechanical
durability and small power consumption are the main benefits of microsystems.